In situ TEM/SEM electronic/mechanical characterization of nano material with MEMS chip

Author： Yuelin Wang   Tie Li   Xiao Zhang   Hongjiang Zeng   Qinhua Jin  

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.35, Iss.8, 2014-08, pp. : 81001-81009

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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