Reduction of elastic strains in directly-bonded silicon structures

Author: Argunova T.   Vitman R.   Grekhov I.   Kostina L.   Kudryavtseva T.   Gutkin M.   Shturbin A.   Härtwig J.   Ohler M.   Kim E.   Kim S.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7834

Source: Physics of the Solid State, Vol.41, Iss.11, 1999-11, pp. : 1790-1798

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