Depth profiles of metal ions implanted in dielectrics at low energies

Author： Stepanov A.   Zhikharev V.   Khaibullin I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.43, Iss.4, 2001-04, pp. : 766-771

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