Nanopolishing of silicon wafers using ultrafine-dispersed diamonds

Author: Kurobe T.   Fujimura T.   Ikeda H.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7834

Source: Physics of the Solid State, Vol.46, Iss.4, 2004-04, pp. : 751-754

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next