Generation of shallow nitrogen-oxygen donors as a method for studying nitrogen diffusion in silicon

Author: Voronkov V.   Batunina A.   Voronkova G.   Mil’vidskii M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7834

Source: Physics of the Solid State, Vol.46, Iss.7, 2004-07, pp. : 1206-1212

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