X-ray diffraction investigation into the specific features of the growth kinetics of oxygen-containing precipitates in Czochralski-grown silicon crystals

Author： Novikov N.   Tesel’ko P.   Mikhalyuk O.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.49, Iss.2, 2007-02, pp. : 215-219

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