Kinetic properties of TiN thin films prepared by reactive magnetron sputtering

Author： Solovan M. Brus V. Maryanchuk P. Kovalyuk T. Rappich J. Gluba M.

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.55, Iss.11, 2013-11, pp. : 2234-2238

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