Integrated characterization of multilayer periodic systems with nanosized layers as applied to Mo/Si structures

Author： Valkovskiy G.   Baidakova M.   Brunkov P.   Konnikov S.   Sitnikova A.   Yagovkina M.   Zadiranov Yu.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.55, Iss.3, 2013-03, pp. : 648-658

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