Getter formation in silicon by implantation of antimony ions

Author： Sadovskii P.   Chelyadinskii A.   Odzhaev V.   Tarasik M.   Turtsevich A.   Vasiliev Yu.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7834

Source： Physics of the Solid State, Vol.55, Iss.6, 2013-06, pp. : 1156-1158

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