Thermally stimulated flow of low-melting glasses during planarization of the surface profiles of microelectronic structures

Author: Zhvavyi S.   Ivlev G.   Pilipenko V.   Ponomar’ V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.43, Iss.11, 1998-11, pp. : 1395-1396

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