Author: Shtan’ko V. Glybin V. Tolmachev V.
Publisher: MAIK Nauka/Interperiodica
ISSN: 1063-7842
Source: Technical Physics, Vol.43, Iss.4, 1998-04, pp. : 396-401
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
Nanolithography by high energy electron beam
Revue de Physique Appliquée (Paris), Vol. 23, Iss. 7, 1988-07 ,pp. :
By Bukhman N.
Technical Physics, Vol. 42, Iss. 6, 1997-06 ,pp. :
By Savenkov G. Morozov V. Bragin V. Kats V. Lukin A.
Technical Physics, Vol. 58, Iss. 7, 2013-07 ,pp. :