Author: Znamenskii A. Marchenko V.
Publisher: MAIK Nauka/Interperiodica
ISSN: 1063-7842
Source: Technical Physics, Vol.43, Iss.7, 1998-07, pp. : 766-773
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Related content
By Vorob’ev A. Gaponov S. Gusev S. Drozdov Yu. Klyuenkov E. Luchin V.
Technical Physics Letters, Vol. 24, Iss. 2, 1998-02 ,pp. :
Current-pressure characteristics of dc magnetron discharge for high-rate sputtering
Journal of Physics: Conference Series , Vol. 653, Iss. 1, 2015-11 ,pp. :