Sputtering of A ³ B ⁵ materials (GaP, GaAs, GaSb, InP, and InSb) by 2-to 14-keV N ₂⁺ ions

ISSN： 1063-7842

Source： Technical Physics, Vol.45, Iss.9, 2000-09, pp. : 1201-1206

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