The effect of low-energy ion bombardment on the density and crystal structure of thin films

Author： Naumov V.   Bochkarev V.   Trushin O.   Goryachev A.   Khasanov É.   Lebedev A.   Kunitsyn A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.46, Iss.8, 2001-08, pp. : 1020-1025

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