Phase interactions in TiNx(TiBx)-n-Si-n +-Si contacts and their thermal degradation due to rapid thermal annealing

Author： Boltovets N.   Ivanov V.   Konakova R.   Milenin V.   Voitsikhovskii D.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.48, Iss.4, 2003-04, pp. : 441-448

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