Three-chamber low-output-pressure glow-discharge-based plasma generator as a negatively charged ion source

Author： Litvinov P. Baturin V. Karpenko A. Pustovoitov S. Eremin S.

ISSN： 1063-7842

Source： Technical Physics, Vol.50, Iss.4, 2005-04, pp. : 468-472

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