Effect of the transition layer on ellipsometric measurement of nanodimensional layers

Author: Bilenko D.   Polyanskaya V.   Getsman M.   Gorin D.   Neveshkin A.   Yaschenok A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.50, Iss.6, 2005-06, pp. : 742-746

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