Formation of higher manganese silicide films on silicon

Author： Kamilov T.   Kabilov D.   Samiev I.   Khusnutdinova Kh.   Muminov R.   Klechkovskaya V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.50, Iss.8, 2005-08, pp. : 1102-1104

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