Structure and properties of zinc oxide films deposited in the recombination burning zone of a low-temperature plasma

Author： Burylin E. Veselov A. Dzhumaliev A. Elmanov V. Istomin S. Kiryasova O. Pushkareva T. Ryabushkin S.

ISSN： 1063-7842

Source： Technical Physics, Vol.52, Iss.5, 2007-05, pp. : 663-665

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