Characteristics of a cylindrical magnetron and reactive sputtering of binary compound films

Author: Goncharov A.   Demchishin A.   Demchishin A.   Kostin E.   Michenko V.   Stetsenko B.   Ternovo E.   Shchurenko A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.52, Iss.8, 2007-08, pp. : 1073-1078

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