Gallium-doped zinc oxide films deposited using an unbalanced magnetron sputtering system

Author： Zakharov A. Oskomov K. Rabotkin S. Solov’ev A. Sochugov N.

ISSN： 1063-7842

Source： Technical Physics, Vol.55, Iss.5, 2010-05, pp. : 719-723

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