On the growth of higher manganese silicide films on silicon

Author: Orekhov A.   Kamilov T.   Gaibov A.   Vakhabov K.   Klechkovskaya V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7842

Source: Technical Physics, Vol.55, Iss.6, 2010-06, pp. : 874-876

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