Deep microrelief measurement and stereo photography in scanning electron microscopy

Author： Sakseev D.   Ershenko E.   Baryshev S.   Bobyl’ A.   Agafonov D.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7842

Source： Technical Physics, Vol.56, Iss.1, 2011-01, pp. : 127-131

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