A method for monitoring thicknesses of nanodimensional bilayer film structures

Author: Stognij A.   Novitskii N.   Stukalov O.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.29, Iss.2, 2003-02, pp. : 147-150

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