Thin diamond films for integrated circuits

Author: Belyi V.   Varnin V.   Gavrilov S.   Il’ichev É.   Poltoratskii É.   Rychkov G.   Teremetskaya I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.29, Iss.5, 2003-05, pp. : 383-384

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