A planar excimer-halogen radiation source pumped by transverse RF discharge

Author： Shuaibov A.   Dashchenko A.   Shimon L.   Shevera I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.29, Iss.8, 2003-08, pp. : 624-626

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