Evaluating mechanical stresses in thin-film structures with ferroelectric PZT films

Author： Pronin I.   Kaptelov E.   Khosina N.   Afanas’ev V.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-7850

Source： Technical Physics Letters, Vol.30, Iss.3, 2004-03, pp. : 228-230

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