Magnetron sputter deposition of (SiC)1−x (AlN)x solid solution films

Author: Guseinov M.   Kurbanov M.   Safaraliev G.   Bilalov B.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7850

Source: Technical Physics Letters, Vol.31, Iss.2, 2005-02, pp. : 138-139

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