Contactless method for studying the parameters of the electrode region of an RF discharge

Author: Aleksandrov A.   Ryaby V.   Savinov V.   Yakunin V.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-780X

Source: Plasma Physics Reports, Vol.28, Iss.12, 2002-12, pp. : 1001-1007

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