Self-consistent model of an inductive RF plasma source in an external magnetic field

Author： Aleksandrov A. Bugrov G. Vavilin K. Kerimova I. Kondranin S. Kral'kina E. Pavlov V. Plaksin V. Rukhadze A.

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.30, Iss.5, 2004-05, pp. : 398-412

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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