Model for calculating low-current moderate-pressure RF discharges with photon-driven secondary electron photoemission from the electrode surface

Author： Baranov I.   Koptev A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.33, Iss.1, 2007-01, pp. : 54-62

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