Coaxial microwave plasma source

Author: Gritsinin S.   Gushchin P.   Davydov A.   Kossyi I.   Kotelev M.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-780X

Source: Plasma Physics Reports, Vol.37, Iss.11, 2011-11, pp. : 965-971

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