Study of the plasma parameters in a high-current pulsed magnetron sputtering system

Author： Odivanova A.   Podkovyrov V.   Sochugov N.   Oskomov K.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1063-780X

Source： Plasma Physics Reports, Vol.37, Iss.3, 2011-03, pp. : 239-243

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