Development of the precision planar motor stage using a new magnet array and robust control with the parametric uncertainty model

Author： Shin Hyun-Jang   Pahk Heui-Jae  

Publisher： Springer Publishing Company

ISSN： 0268-3768

Source： The International Journal of Advanced Manufacturing Technology, Vol.33, Iss.7-8, 2007-07, pp. : 643-651

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