A dual-stage control system for high-speed, ultra-precise linear motion

Author: Song Yixu   Wang Jianfa   Yang Kaiming   Yin Wensheng   Zhu Yu  

Publisher: Springer Publishing Company

ISSN: 0268-3768

Source: The International Journal of Advanced Manufacturing Technology, Vol.48, Iss.5-8, 2010-05, pp. : 633-643

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