Origin of electrical improvement of amorphous TaInZnO TFT by oxygen thermo-pressure-induced process

Author:         Chung Kwun-Bum   Park Jin-Seong  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.10, 2014-03, pp. : 105104-105111

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