An investigation into second harmonic generation by Si-rich SiNx thin films deposited by RF sputtering over a wide range of Si concentrations

Author： Kitao Akihiro   Imakita Kenji   Kawamura Ibuki   Fujii Minoru  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.21, 2014-05, pp. : 215101-215108

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