Measurement of absolute CO number densities in CH3F/O2 plasmas by optical emission self-actinometry

Author: Kaler Sanbir   Lou Qiaowei   Donnelly Vincent M   Economou Demetre J   Karakas Erdinc  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.8, 2014-02, pp. : 85203-85211

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