Novel method for dimensional measurements of nanorelief elements based on electron probe defocusing in a scanning electron microscope

Author： Filippov M N   Gavrilenko V P   Mityukhlyaev V B   Rakov A V   Todua P A  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.4, 2014-04, pp. : 44008-44018

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