The determination of the spring constant of T-shaped cantilevers using calibration structures

Author: Sikora Andrzej   Bednarz Lukasz   Ekwiński Grzegorz   Ekwińska Magdalena  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.25, Iss.4, 2014-04, pp. : 44015-44021

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