Feasibility study on the concept of thermal contact sensor for nanometre-level defect inspections on smooth surfaces

Author: Shimizu Yuki   Lu Wenjian   Ohba Yuta   Gao Wei  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.25, Iss.6, 2014-06, pp. : 64006-64016

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