Semi-contact measurements of three-dimensional surfaces utilizing a resonant uniaxial microprobe

Author： Goj Boris   Dressler Lothar   Hoffmann Martin  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.6, 2014-06, pp. : 64012-64020

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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