Procedure and reference standard to determine the structural resolution in coordinate metrology

Author： Bartscher Markus Jusko Otto Härtig Frank Neuschaefer-Rube Ulrich Wendt Klaus Illemann Jens

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.6, 2014-06, pp. : 64015-64023

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