Optical interferometric approach for measuring the geometrical dimension and refractive index profiles of a double-sided polished undoped Si wafer

Author： Lee Ho-Jae   Joo Ki-Nam  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.7, 2014-07, pp. : 75202-75209

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