On sheath energization and Ohmic heating in sputtering magnetrons

Author: Huo Chunqing   Lundin Daniel   Raadu Michael A   Anders André     Brenning Nils  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.4, 2013-08, pp. : 45005-45011

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