Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings

Author： Styrnoll T   Harhausen J   Lapke M   Storch R   Brinkmann R P   Foest R   Ohl A   Awakowicz P  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.4, 2013-08, pp. : 45008-45015

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