Kinetic simulation of the sheath dynamics in the intermediate radio frequency regime

Author: Shihab M   Elgendy A T   Korolov I   Derzsi A   Schulze J   Eremin D   Mussenbrock T   Donkó Z   Brinkmann R P  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.5, 2013-10, pp. : 55013-55017

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next