Monitoring particle growth in deposition plasmas

Author： Schlebrowski T   Bahre H   Böke M   Winter J  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.6, 2013-12, pp. : 65014-65020

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Kinetic Mie ellipsometry to determine the time-resolved particle growth in nanodusty plasmas

By  

Journal of Physics D: Applied Physics, Vol. 48, Iss. 46, 2015-11 ,pp. : 465203-465211

IOP Publishing

Access to resources Recommend Favorite

Charge dependence of nano-particle growth in silane plasmas under UV irradiation

By  

New Journal of Physics, Vol. 11, Iss. 1, 2009-01 ,pp. : 161-169

IOP Publishing

Access to resources Recommend Favorite

Versatile particle collection concept for correlation of particle growth and discharge parameters in dusty plasmas

By  

Journal of Physics D: Applied Physics, Vol. 48, Iss. 5, 2015-02 ,pp. : 55203-55211

IOP Publishing

Access to resources Recommend Favorite

Diagnostics of deposition plasmas

By  

Le Journal de Physique IV, Vol. 08, Iss. PR7, 1998-10 ,pp. : Pr7-217-Pr7-230

Edp Sciences

Access to resources Recommend Favorite

Dust particle growth in rf silane plasmas using two-dimensional multi-pass laser light scattering

By  

New Journal of Physics, Vol. 11, Iss. 10, 2009-10 ,pp. : 54-61

IOP Publishing

Access to resources Recommend Favorite