Study on electrostatic and electromagnetic probes operated in ceramic and metallic depositing plasmas

Author： Styrnoll T   Bienholz S   Lapke M   Awakowicz P  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.2, 2014-04, pp. : 25013-25020

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