Author： Tarvainen O Izotov I Mansfeld D Skalyga V Golubev S Kalvas T Koivisto H Komppula J Kronholm R Laulainen J Toivanen V
Publisher： IOP Publishing
ISSN： 0963-0252
Source： Plasma Sources Science and Technology, Vol.23, Iss.2, 2014-04, pp. : 25020-25027
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